The GPR-SMV Vacuum Robot System is a high-performance dual-arm vacuum robot employing Genmarks breakthrough patented GPR™ technology.
The GPR-SMV Vacuum Robot System combines the functionality of a two-link robotic arm for accurate, repeatable indexing and transportation of semiconductor wafers in vacuum down to 10E-10 Torr, with the motion of dual arms performing wafer swapping at the process chambers, source cassettes etc.
The mechanics of this robot contribute to its simplicity, modular design, easy control, teaching, and programming. Advanced motion planning in continuous smooth trajectories guarantees superior performance and effective implementation in various back-end layouts.
The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
| Configuration | |
| Wafer Sizes | Wafers up to 450mm |
| Arm Configuration(s) | 2 Link 6.5"-6.5" |
| End Effectors Types | Gravity |
| Physical Properties | |
| Size (Diameter) | 14" |
| Body Height | 24.1" |
| Axes | 6: T, R, R2, Z, Z1, Z2 |
| Range of Motion |
T: 360° R and R2: - 6.5"-6.5": [- 12.8", 12.8"] Z: 3" Tilt: 1.0° |
| Performance | |
| Payload | 12 lb |
| Base Operating Pressure | 10E-10 Torr |
| Leak rate | <1*10E-9 std cc/sec |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" R2: +/- 0.001" Z: +/- 0.001" |
| Radial ( R ) | 0.001" |
| Rotational ( T ) | 0.01° |
| Vertical ( Z ) | 0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >14M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
