The AVR SMV 3000 is a high-performance dual-arm vacuum robot that provides precise, reliable and repeatable wafer transportation in vacuum processing capital equipment down to 10E-10 Torr.
Latest technology incorporated into the arm and transmission design guarantees zero backslash after the inevitable collision with the occasionally "overactive" gate valve. This translates into immediate recovery without having to re-teach the robot. The mechanics of this robot contribute to its simplicity, modular design, easy control, teaching and programming.
Advanced motion planning in continuous smooth trajectories guarantees superior performance and effective implementation in various back-end layouts.
The AVR SMV 3000 is available with various end - effector options, allowing the robot to transport a wide array of wafers, FPDs and photomasks.
| Configuration | |
| Wafer Sizes | Wafers up to 300mm |
| Arm Configuration(s) | 2 Link 7.5"-7.5" |
| End Effectors Types | Gravity |
| Physical Properties | |
| Size (Diameter) | 11.5" |
| Body Height | 20.46" |
| Axes | 4: T, R, R2, Z. |
| Range of Motion |
T: 360° R and R2: -7.25"-7.25": [-13.775", 13.775"] Z: 1.5" |
| Performance | |
| Payload | 12 lb |
| Base Operating Pressure | 10E-10 Torr |
| Leak rate | <1*10E-9 std cc/sec |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" R2: +/- 0.001" Z: +/- 0.001" |
| Radial ( R ) | 0.001" |
| Rotational ( T ) | 0.01° |
| Vertical ( Z ) | 0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >14M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
