The AVR-3000 Vacuum Robot System provides highly precise and reliable transportation in ultra-clean, high-vacuum processing environment. The AVR-3000 is operable up to 10E-10 Torr.
Special kinematics and motion transmitting design guarantee fast motion of the arm, zero backlash, and robustness against excessive external forces, applied to the links.
Advanced motion coordination over multi-segment trajectories with overlapping velocity profiles guarantees smooth and effective material transfer.
The AVR-3000 has 0.5" vertical travel and is available with various end-effector options, allowing the robot to transport a wide array of wafers up to 450mm, photo-masks, FPD's over an extended radial reach.
| Configuration | |
| Wafer Sizes |
Wafers up to 450mm Platters and other fixtures |
| Arm Configuration(s) |
2 Link 5.25"-5.25" 2 Link 7.5"-7.5" 2 Link 10.5"-10.5" 2 Link 12.5"-12.5" |
| End Effectors Types | Gravity |
| Physical Properties | |
| Size (Diameter) | 9.83" |
| Body Height | 12.77" |
| Axes | 3: T, R, Z |
| Range of Motion |
T: 500° R: - 5.25"-5.25": -7.5",10.5" - 7.5"-7.5": +/- 14.5" - 10.5"-10.5": +/- 20" - 12.5"-12.5": +/- 24" Z: 1" |
| Performance | |
| Payload | 5lb |
| Base Operating Pressure | 10E-10 Torr |
| Leak rate | <1*10E-9 std cc/sec |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" |
| Radial ( R ) | 0.001" |
| Rotational ( T ) | 0.01° |
| Vertical ( Z ) | 0.001" |
| Reliability (MTBF) | >80,000 hours |
| Environment | |
| Cleanliness | < Class 1 Clean Room Compatible |
| Wafer contact Materials | Aluminum, SS, Viton, Vacuum Grease |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >12.7M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement.
The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
