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The AVR-2000 Vacuum Robot System provides highly precise and reliable transportation in ultra-clean, high-vacuum processing environment.
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The AVR-3000 Vacuum Robot System provides highly precise and reliable transportation in ultra-clean, high-vacuum processing environment. The AVR-3000 is operable up to 10E-10 Torr.
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The AVR-3600 Vacuum Robot System provides highly precise and reliable transportation in ultra-clean, high-vacuum processing environment.
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The AVR SMV 3000 is a high-performance dual-arm vacuum robot that provides precise, reliable and repeatable wafer transportation in vacuum processing capital equipment down to 10E-10 Torr.
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The GPR-GB9 Vacuum Robot System is one of the latest additions to Genmark’s GPR™ line of precision transport robotics and is available with vertical stroke options of 3" and 6".
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The GPR-SMV Vacuum Robot System is a high-performance dual-arm vacuum robot employing Genmarks breakthrough patented GPR™ technology.
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The GPR™ Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment.
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The Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment, where the material handling is performed by robots limited vertical motion capabilities.
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