Genmark Automation's Porta R5™ is a BOLTS compatible load port specifically designed for automated reticle loading. It features a transparent enclosure accommodating up to 6 individual containers for 125mm reticles. The enclosure has scanning sensors indicating the proper placement of each container and the reticle presence inside of it. The Porta R5™ has electromagnetic door lock, servo-actuated reticle box opener and isolation door providing fully automated and safe reticle access.
| Configuration | |
| Compatibility | BOLTS compatible |
| Carrier Types | 6 125mm reticle carriers |
| Wafer Size | 125mm reticles |
| Substrate Type | Reticle |
| Status Indicators | 2 lights - "Placement" and "Action OK" |
| Operator Push Buttons | One Manual Access button |
| Carrier Sensors | Carrier Placement Sensors |
| Wafer Mapping | Reticle presence sensors |
| Physical Properties | |
| Clamping Mechnism | Lockable interlock of the carriers loading door |
| Height |
- 1385mm (54.54 inches) With cart - 1336mm (52.61 inches) Without cart |
| Width | 470mm (18.50 inches) |
| Actuation |
- Servo motor driven carriers opening mechanism - Servo motor driven door opening mechanism |
| Performance | |
| Reliability |
MCBlp > 150K cycles MCBl > 321.877 cycles MTTR 60 minutes Availability 99.89% |
| Speed |
Load: 5.5 seconds |
| Environment | |
| Cleanliness | Class 1 ANSI, when in class 100 environment |
| Standards Compliance | |
| SEMI |
- E15.1: Load Port - S2 Compliance - S8 Ergonomics guideline compliance - E44 Guide for Procurement and Acceptance of Minienvironments - E10 Availablity |
| Other Standards |
- Seismic Stability for UBC Zone 4 area and S2 - EU Machinery Directive - EU Low voltage dir. - EU EMI/ESD - Carrier ID Reader per I300I Factory guideline |
| Reliability per SEMI E10 | |
| MCBF (cycles) | > 1M |
