The Porta300™ plus is an advanced load port for 300mm wafer carriers. Uniquely designed, yet in accordance to all applicable SEMI standards and I300I guidelines, the Porta300™ plus sets a new benchmark in cleanliness, reliability, performance and functionality for the equipment in this category. The state-of-the art wafer mapping delivers 100% accuracy. All major motions are pneumatic controlled, providing fast and precise carrier loading. The operation of the opener is controlled by full set of safety interlocks protecting both the operator and the equipment. A dedicated set of through-beam sensors avoids collision with robotic arm or wafer. The E84 connector is a standard feature along with the visual indicators – provided in compliance with the latest revision of the E87 standard. The software support, integrated in the GB Toolbox, provides simple yet comprehensive diagnostic features and user-friendly operator interface.
| Configuration | Porta300 plus |
| Compatibility | BOLTS compatible |
| Carrier Types |
- FOUP, 25 wafers - FOSB, 25 wafers - 25 wafers 150mm and 200mm cassettes when using open cassette adaptor |
| Wafer Size | 150mm, 200mm, 300mm |
| Substrate Type | Wafer |
| Status Indicators | Eight lights, custom configurable |
| Operator Push Buttons | Two - load and unload (can be custom configured) |
| Carrier Sensors | Present, placed |
| Wafer Mapping | Through-beam |
| Carrier ID reader/writer | IR, RF, Bar code |
| Physical Properties | |
| Clamping Mechanism |
- Pneumatically actuated keys opening the FOUP door - Pneumatically actuated FOUP lock |
| Height |
1410mm (55.51 inches) With cart 1340mm (52.76 inches) Without cart |
| Width | 476mm (18.74 inches) |
| Actuation | All Major Axis are Pneumatically actuated and controlled. |
| Performance | |
| Reliability |
- MTBF > 150,000 HR - MCBF > 25 M CYCLES - Availability 99.9% |
| Speed |
Load: 13 seconds with wafer mapping and |
| Environment | |
| Cleanliness | Class 1 ANSI, when in class 100 environment |
| Standards Compliance | |
| SEMI |
-E15.1: Load Port -E1.9: Mechanical Specification for Cassettes Used to Transport and Store 300mm Wafers -E10: Equipment Reliability, Availability and Maintainability (RAM) -E47.1: FOUP -E57: Kinematic Coupling -E63: BOLTS-M -E64: Cart Docking Interface -E72: Equipment Footprint, Height and Weight -E83: PVG Docking Flange -E84: Carrier Handoff and Parallel I/O -E110: Indicator / Switch Placement -M31: FOSB -S2: Safety Guidelines for Semiconductor Manufacturing Equipment -S8: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| Other Standards |
- Seismic Stability for UBC Zone 4 area and S2 - EU Machinery Directive - EU Low voltage dir. - EU EMI/ESD - Carrier ID Reader per I300I Factory guideline |
| Reliability per SEMI E10 | |
| MCBF (cycles) |
- MTBF > 150,000 HR - MCBF > 25 M CYCLES - Availability 99.9% |
