Designed for ultra-precise transport of 300mm and 450mm wafers and large FPDs, the GPR-GB8-TL Robot System combines expanded work envelop capabilities and load capacity while employing Genmark’s patented GPR™ system.
The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
The GPR-GB8-TL is an exceptionally robust, structurally reinforced robotic transport system capable of handling heavy end-effectors for 300/450mm wafer applications, reticles and flat panels.
The unique and patented YAW technology feature of the GPR-GB8-TL robot enables it to access in-line process modules, FOUPS and cassettes from a fixed centralized location and eliminates the need for radial placement of process and other stations around the robot. The GPR-GB8-TL Robot System is available in 2 or 3 telescopic platform configurations.
| Configuration | |
| Wafer Size | up to 450mm |
| Arm Configuration(s) |
2 Link 9.25"-9.25" 3 Link 4.425"8.85"-4.425" 3 Link 5.95"-11.9"-5.95" 3 Link 8.05"-16.1"-8.05" 3 Link 9.25"-18.5"-9.25" |
| End Effectors Types |
Arm Configuration 1: Vacuum or Edge Gripping Arm Configuration 2: Vacuum Gripping, Edge Gripping, Gravity |
| Wafer Mapping | reflective; through-beam |
| Physical Properties | |
| Size (Diameter/Length) | 22.8" body dia |
| Axes | 9: T, R, Y, Z, Z1, Z2, L, L1, L2 |
| Range of Motion |
T: 500° R:- - 8"-8": [-15.2", 15.2"] - 4.425"8.85"-4.435": [-16.8", 16.8"] - 5.95"-11.9"-5.95": [-22.6", 22.6"] - 8.05"-16.1"-8.05": [-30.7", 30.7"] - 9.25"-18.5"-9.25": [-35.15", 35.15"] Z: 30" (complex axis, Z + L) Y: 344° Tilt: 1.5° |
| Performance | |
| Payload (Dynamic/Static) | 5lb |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" Y: +/- 0.005° |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN 55011 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >15M |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
