The GPR-GB8-SM is a precise high-performance dual arm robot for automated transport applications of 300mm and 450mm wafers.
The combination of global linear motion of the two-links arm (R-axis) and rotation (Y-axis) of two swapping arms (A1 and A2 axes) ensure optimal handling of up to 4 in-line FOUPs, and dimensionally equivalent process modules, without the need to mount the robot on linear track component.
The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
Advanced robot motion planning algorithms assures smooth robot motion and fast swapping of wafers at the process positions and wafer carriers.
| Configuration | |
| Wafer Size | up to 450mm |
| Arm Configuration(s) |
Option 1:O One Global Translation Arm 11.075"-11.075" Two Swapping Arms: 6.45"-6.45" Option 2: One Global Translation Arm 5.95"-11.9"-5.95" Two Swapping Arms: 5.45"-5.45" |
| End Effectors Types |
Arm Configuration 1: Vacuum or Edge Gripping Arm Configuration 2: Vacuum Gripping only |
| Wafer Mapping | through-beam |
| Physical Properties | |
| Size (Diameter/Length) | 14" body diameter |
| Axes | 8: T, R, Y, A1, A2, Z, Z1, Z2 |
| Range of Motion |
T: 500° Global Translation Arms (R axis): - 2 Link 11.075"-11.075": [-21", 21"] - 3 Link 5.95'-11.9'-5.95": [-30.6", 30.6"] Swapping Arms (A1, A2 axes): - 2 Link 5.45"-5.45": [-10.35', 10.35"] - 2 Link 6.46"-6.46": [-8.01, 12.3"] Z: 12.5" Y: 680° |
| Performance | |
| Payload (Dynamic/Static) | 1.5lbs per swapping arm |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" A1/A2: +/- 0.001" Z: +/- 0.001" Y: +/- 0.005° |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN 55011 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >15M |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
