Designed for ultra-precise transport of 300/450mm wafers and large FPDs, the GPR-GB8 Robot System combines increased reach and load capacity while employing Genmark’s breakthrough patented GPR™ technology.
The patented GPR™ technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
The GPR-GB8 Robot System is an exceptionally robust, structurally reinforced transport system capable of handling heavy payloads including fixture end-effectors for up to 450mmm wafer handling and large specialized end-effectors for FPD transport applications.
| Configuration | GB8 | GB8Y |
| Arm Configuration(s) |
2 Link 8"-8" 3 Link 4.425"-8.85"-4.425" 3 Link 5.95"-11.9"-5.95" 3 Link 8.05"-16.1"-8.05" |
2 Link 9.25"-9.25" 3 Link 4.425"-8.85"-4.425" 3 Link 5.95"-11.9"-5.95" 3 Link 8.05"-16.1"-8.05" 3 Link 9.25"-18.5"-9.25" |
| End Effectors Types | Vacuum gripping, Edge Gripping, Gravity | Vacuum gripping, Edge Gripping, Gravity |
| Wafer Mapping | Reflective; through-beam | Reflective; through-beam |
| Physical Properties | ||
| Size (Diameter/Length) | 14" | 14" |
| Axes | 5: T, R, Z, Z1, Z2 | 6: T, R, Y, Z, Z1, Z2 |
| Range of Motion |
T: 500° R: - 8"-8": [-15.2", 15.2"] - 4.425"-8.85"-4.425": [-16.8", 16.8"] - 5.95"-11.9"-5.95": [-22.6", 22.6"] - 8.05"-16.1"-8.05": [-30.7", 30.7"] Z: 12.5", 17", 20", 25" Tilt: 1.5° |
T: 500° R: - 9"-9": [-17.6", 17.6"] - 4.425"-8.85"-4.425": [-16.8", 16.8"] - 5.95"-11.9"-5.95": [-22.6", 22.6"] - 8.05"-16.1"-8.05": [-30.7", 30.7"] - 9.25"-18.5"-9.25": [-35.15", 35.15"] Z: 12.5", 17", 20", 25" Y: 344° Tilt: 1.5° |
| Performance | ||
| Payload (Dynamic/Static) | 5 lb | 5lb |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" Y: +/- 0.005° |
| Environment | ||
| Cleanliness | ISO Class 1 Compatible | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | ||
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN 55011 EN ISO 12100-2:2003 RIA R15.06:1999 |
EN 60204-1:1997 EN 55011 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | ||
| Reliability per SEMI E10 | >15M | >15M |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
