The GB7S Robot System employs Genmark’s breakthrough and patented GPR™ Technology to achieve the highest level of performance currently available in an automated wafer handler which is capable of handling up to 450mm diameter wafers. The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads. The unique and patented YAW technology feature of the GPR-GB7S Robot System enables it to access in-line process modules, FOUPS and cassettes from a fixed centralized location, and eliminates the need for radial placement of process and other stations around the robot. The GB7 Robot System can have various arm configurations to accommodate a wide range of SMIF/cassettes front-end layouts.
| Configuration | |
| Wafer Size | up to 450mm |
| Arm Configuration(s) |
3 Link 6"-12"6" 3 Link 4"-8"-4" 2 Link 8"-8' |
| End Effectors Types | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | reflective; through-beam |
| Physical Properties | |
| Size (Diameter/Length) | 9.96" (body DIA) |
| Axes | 5: T, R, Z, Z1, Z2 |
| Range of Motion |
T: 500° R: - 6"-12"-6": [-22.8", 22.8"] - 4"-8"-4"; [-17.1", 17.1"] - 8"-8": [-22.8", 22.8"] Z: 17"; 20" Tilt: 1.5° |
| Performance | |
| Payload (Dynamic/Static) | 2.5lbs |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" Y: +/- 0.005° |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized AI, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1 EN 292-1 EN 292-2 |
| Reliability | |
| Reliability per SEMI E10 | >15M |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
