The GB4P Robot System with integral wafer pre-aligner is the most compact robot and pre-aligner package available on the market today for wafer handling applications up to 200mm, standard payload and throughput.
Identical in size to Genmark’s original GB4 robot, the GB4P houses a built-in pre-aligner for wafers ranging from 2"- 8" in diameter. The adjustable feature on the pre-aligner allows for simple and fast configuration for different wafer sizes. Engineered for single or dual wafer transport, the GB4P robot is available with an extensive variety of reach and vertical stroke combinations.
Genmark's GB4P Robot System is a highly accurate, repeatable, and reliable wafer handling and aligning solution for wafer sizes up to 200mm.
| Configuration | |
| Arm Configuration(s) | 5.25"-5.25"; 7.25" -7.25"; 4"-8"-4" |
| End Effectors Types | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | reflective; through-beam |
| Physical Properties | |
| Size (Diameter/Length) | 9.76" (body DIA) |
| vert. stroke - body height |
7" - 13.5" 8.5" - 14.3" 12" - 17.85" 17" - 23.5" 20" - 26.5" |
| Axes |
5: Robot - T, R, Z Prealigner - V (vertical), P (chuck rotation) |
| Range of Motion |
T: 500° R: - 5.25"-5.25": [-10.5", 10.5"] - 7.25"-7.25"; [-14.5", 14.5"] - 4"-8"-4": [-16", 16"] Z: 7"; 8.5"; 12"; 17"; 20" |
| Performance | |
| Payload (Dynamic/Static) | 2lbs |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized AI, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC(EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1 EN 292-1 EN 292-2 |
| Reability | |
| Reliability per SEMI E10 | >15M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
