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Products -> Tool Automation -> Atmospheric -> GB4S-CTR Robot System
GB4S-CTR Robot System
 

Features:

Cassette Transport Robot Features

  • Accurate repeatable transport of all SEMI compatible 150mm, 200mm and 300mm cassettes
  • Compact footprint
  • Stocker compatible
  • Handle payloads up to 15kg
  • DSP-based motion controller for vibration-free cassette transport
  • 2-Link Heavy Duty Arm
  • Custom end- effector options allow for flexible cassette handling

GB4S-CTR Robot System

Genmark's GB4S-CTR Wafer Carrier Transport Robot is designed to transport carriers for wafer sizes up to 300mm quickly and accurately between user defined stations. Applications include stocker bay load and unloading as well as intra-bay cassette transport between tool load ports and process chambers. The GB4S-CTR's compact size allows easy integration in semiconductor manufacturing tool designs without impacting tool footprint. 

The robot's structurally reinforced 2-link arm maintains the compact footprint while providing the payload capacity required for fast, smooth and repeatable transportation of fully loaded carriers.

Specifications

Configuration  
Wafer size up to 300mm wafer cassettes
Arm Configuration(s) 2 link: 5.20"-5.20";
End Effectors Types Gravity
Physical Properties  
Size (Diameter/Length) 9.76" (body DIA)
Vertical stroke - body height 0" - 9.3"
Axes 2 - T, R
Range of Motion T: 500°
R: [-10.2", 10.4"]
Z: 0.00"
Performance  
Payload (Dynamic/Static) 33lbs
Repeatability T: +/- 0.01°
R: +/- 0.001"
Environment  
Cleanliness ISO Class 1 Compatible
Wafer contact Materials Vespel, Peek, Teflon impregnated anodized AI, Alumina, Stainless Steel
Standards Compliance  
Applicable Directives/Standards Machine Directive 89/392/EEC
Low Voltage Directive 73/23/EEC
89/336/EEC(EMC)
SEMI S2-93A
Standards to Verify Compliance EN 60204-1
EN 292-1
EN 292-2
Reliability  
Reliability per SEMI E10 >6M

Black Box Option:

The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:

  • Equipment Uptime, Downtime, Manufacturing Time and Total Running Time. The data is in compliance    with the SEMI E10-0701 standard.
  • Number of revolutions for each motor.
  • Number of faults due to excessive speed/acceleration or overloads caused by robot collisions.
  • Robot specific information like serial number, calibration data and additional statistical data.

The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.

The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.

Black Box Specifications

  • Number of motors observed: up to 8
  • Storage media: 64KB FLASH
  • Data retention time: More than 10 years
  • Communication interface: RS232, Ethernet (optional).