The EVTMHS is a wafer handling system with extended vertical travel designed to transport 300mm and 450mm wafers in semiconductor manufacturing tools that require large work envelope solutions.
The system can also handle 200 mm wafers without any hardware changes. While for wafer sizes below 200 mm, the robot End-Effector has to be reconfigured. The time that this reconfiguration takes is usually less than an hour including the time needed to teach all the pickup positions. Thus, the average teaching time of 45 minutes (for pickup locations) can be achieved thanks to the sophisticated autoteach routines provided by the system firmware.
The optional through beam mapping sensor allows for reliable detection of normally inserted, cross-slotted, or double-slotted wafers in FOUPs and boats. Depending on the chosen arm configuration the system can access one or two in-line Semi standard FOUPs. From the operational point of view, the system is fully integrated and controlled by a single controller.
| Configuration | |
| Wafer Size | up to 450mm |
| Arm Configuration(s) | 7-25"-7.25" |
| End Effectors Types | Vacuum, Edge-Gripping, Gravity |
| Wafer Mapping | Reflective; through-beam |
| Physical Properties | |
| Size (Diameter/Length) | 11.7" (length) |
| Axes | 3 – T,R,Z. |
| Range of Motion |
T: 500° R: [-14.25", 14.25"] Z: 40.57" |
| Performance | |
| Payload (Dynamic/Static) | 2 Lb |
| Repeatability |
T: +/- 0.01° R: +/- 0.001" Z: +/- 0.001" |
| Environment | |
| Cleanliness | ISO Class 1 Compatible |
| Wafer contact Materials | Vespel, Peek, Teflon impregnated anodized Al, Alumina, Stainless Steel |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEc 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204-1:1997 EN 55011 EN ISO 12100-2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 | >15M MCBF |
The Black Box is a small electronic device installed inside the robot body. It collects and stores critical information about the robot operation. The preserved information includes:
The accumulated information provides objective criterion for the need of preventive maintenance procedures. The usage data can be used for lubrication scheduling or belts and motors replacement. The same information allows adjusting the robot warranty term based on the real usage rather than just on a fixed time period. This feature can extend the warranty for robots not actively in use.
The Black Box is compatible with all Genmark Automation robots. It has its own interface and does not require update of the robot firmware.
