This remote measurement unit, comprising with three CCDs (Charge Coupled Devices), is designed to work with flat panel handling robots in order to determinate the position and orientation of a flat panel. The last moves of the flat panel inside the CCD-area and the misalignment of the flat panel are immediately calculated based on the CCD readings. The compensation of the misalignment can be accomplished during the transportation of the object to the target cassette or process station.
| Works with | Flat panels |
| Wafer size |
- Min panel size : 125 mm x 125mm - Max panel size : not restricted |
| Alignment Accuracy | |
| Center Offset | 0.0015" |
| Angular Offset | 0.1 degrees |
| Alignment time | 3 sec |
| Initial Offset Allowance | 0.5" |
| Servo Light-house Gap | 0.35", 0.5" |
| Maximum Vertical Velocity | 20"/s |
| Maximum Vertical Acceleration | 40"/s2 |
| Physical Properties | |
| Vertical travel-body height |
8.5" - 14" 13"- 18.5" 16" – 25.35" |
| Length | 12.8" |
| Width | 4.4" |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204- 1:1997 EN ISO 12100- 2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 / MCBF | >20M |
This measurement unit consists of two single degree of freedom robotic arms that carry CCD cameras. It works in a combination with flat panel handling robots in order to position the flat panel inside the CCD area with high degree of accuracy (±0.001"). The CCD area is adjustable and it allows for alignment of a wide range of flat panels. After the alignment both CCD arms retract to clear the alignment area for further manipulation of the flat panel.
Alignment time < 5.0 seconds
Alignment accuracy - X, Y ±0.002"
O ±0.125° Capture range / initial offset allowance ± 0.500"
Substrate sizes: 20mm x 340mm, 360mm x 450mm, 500mm x 500mm, 600mm x 600mm, 650mm x 700mm, 760mm x 760mm
