The Edge-Grip Pre-Aligners are autonomous devices providing accurate and efficient wafer alignment and exceptional performance when combined with Genmark's Edge-Grip End-Effectors. The Edge-Grip Pre-Aligners are designed to work with 300mm and 200mm notched wafers regardless of their coating characteristics.
A specially designed motion sequence delivers vibration and stress free performance throughout the entire alignment process. The optional wafer buffer increases the throughput in both single and batch wafers transfer modes.
| Wafer size | 300 mm |
| Flat of notch orientation | Notch |
| Alignment Accuracy | |
| Center Offset | 0.004" (defined by the standard tolerances in the wafer size) |
| Angular Offset | +/- 0.01 degrees |
| Alignment time |
Typical : 6 sec Min : 4 sec |
| Initial Offset Allowance | 0.04" |
| Servo Light-house Gap | 0.75" |
| Physical Properties | |
| Vertical travel-body height | No vertical travel |
| Length | 12" |
| Width | 10" |
| Height | 11" |
| Standards Compliance | |
| Applicable Directives/Standards |
Machine Directive 89/392/EEC Low Voltage Directive 73/23/EEC 89/336/EEC (EMC) SEMI S2-93A |
| Standards to Verify Compliance |
EN 60204- 1:1997 EN ISO 12100- 2:2003 RIA R15.06:1999 |
| Reliability | |
| Reliability per SEMI E10 / MCBF | >10M |
