The AVR-2000 Vacuum Robot System provides highly precise and reliable transportation in ultra-clean, high-vacuum processing environment.

Genmark’s newest robotic series, the G-Rex™ addresses all current technical specifications for standard payload 300mm and 450mm wafer transport tool applications as the most precise and highest throughput atmospheric robot solution currently available on the market.

The GPR-GB7SY Yaw-Axis (single and dual yaw) robot features Genmark’s technologically advanced mechanisms including patented GPR and YAW technologies to achieve the highest level of performance currently available in an automated material handler capable of transporting up to 450mm wafer payloads with utmost reliability and precision.