Motion Control Components

State of the Art Motion Control Features

Control of versatile robotic structures, including "yaw", "pitch" and "roll" motion capabilities
S-curve velocity profiling, based on polynomial splines and Bernstein-Bezier curves
Continuous path control in multi-segment smooth trajectories
Synchronization of multiple axes
Trajectory control with user defined velocity profiles
Kinematical modeling of open and closed loop mechanisms
Singularity consistent path planning and singularity avoidance
Optimal PID filter tuning
Automatic adjustment with respect to the surrounding equipment (cassettes, process stations, etc.)
Tilting capabilities in terms of the end-effector frame
Compensation for deflection of the end effector, the manipulated object and geometric in accuracies of the arm Scanning and Aligning Features
Wafer mapping based on through-beam or reflective sensors
Automatic detection of the planarity and the center of wafers and FPD
Non contact FPD aligning. Misalignment compensation on the fly Safety