Genmark’s SortMax300 HT™ is capable of achieving the highest wafer per hour throughput requirements while operating under strict reliability and cleanliness specifications. Based on modular design it can support configurations up to 8 FOUP/FOSB stations. Highest throughput capacity is a result of expanded technological features including uniquely designed dual end-effector wafer transfer mechanisms based on Genmark’s proven GREX dual arm robot series.
SortMax300 HT™ also offers highly improved software functionality and reliability based on the latest ECS300 Equipment Control Software suite. Along with rapid set-up, the highly sophisticated software suit has been improved to included built-in support for the latest fab requirements. Special “auto-teach” scripts are included to further simplify the wafer-handler teaching process, optimize operator interface and reduce downtime during maintenance periods.
Genmark's high throughput wafer sorter SortMax300 HT™ is designed for handling up to 300mm wafers and is offered in standard or custom configurations. A wide array of end-effectors, wafer mappers and single or dual wafer aligners are some of its many options.
| Enclosure | |
| Base Frame | Welded steel, BOLTS compatible load ports |
| Coating | Baked powder coat |
| Capacity (Stocker) | Up to 8 Loadports |
| Fan Filter | |
| Fan Filter Unit | Per customer specification |
| Filter Media | PTFE ULPA 99.99995% @ 0.1 micro meters efficiency |
| Wafer Size | Up to 300 mm |
| Automation | |
| Atmospheric Robot (types) | Grex4 |
| End Effector (types) | Vacuum gripping, Edge gripping |
| Pre-Aligner types | Vacuum gripping chuck; edge gripping chuck |
| Wafer Mapping | Through-beam |
| User Interface | Keyboard, mouse, touch screen |
| Software Interface | SEMI E30, E84, E87, E90, E40, E94, E99, E118, E116 |
| Communications | RS232 (SECS-I), Ethernet (HSMS) |
| Physical Properties | |
| Length |
Two load ports – 45" Three load ports – 66" Four load ports – 80" |
| Air Pressure: Relative to Cleanroom Ambient | |
| Port closed | Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13Pa) |
| Load/Unload | Spec: 0.01 +/- 0.005 inches w.c., (2.5 +/- 0.13Pa) |
| ME Recovery time | < 38 sec |
| Air Flow Velocity | 90 +/- 10% ft/min, (0.45 +/- 10% m/sec) |
| Standards Compliance | |
| SEMI |
- SEMI S1-0701 - SEMI S2-1102 - SEMI S7-96 - SEMI S8-0701 - SEMI S9-1101 - SEMI S10-1296 - SEMI S13-0298 - SEMI E15-0698 - SEMI E44-96 - SEMI E54-0997 - SEMI E58-0301 - SEMI F47-0400 |
| Other Standards | CE Standards, International Sematech Integrated Minienvironment Best Design Practices. |
| Environment | |
| Cleanliness | Class 1000 or better |
