Achieve exceptional performance with Genmark's SortMax200™ wafer sorter, designed for handling wafers up to 200mm. The SortMax200™ can be configured to accommodate a maximum number of eight open cassette stations.
With years of experience building bridge tools integrating different processes such as wafer thickness measurement, UV cleaning/erasing and ID application to name a few, Genmark delivers the most reliable and serviceable 200mm small footprint sorter on the market today. A wide variety of wafer mappers, pre-aligners, and end-effectors are some of its many options.
Fully compliant with SEMI standards and fab requirements, Genmark's 200mm wafer sorter SortMax200™ is easily configurable to customer’s changing requirements.
Combined with Genmark's powerful and customizable ECS300 Equipment Control Software featuring standard operational functions such as Sort, ID, Transfer, Compress, Align and Merge/Split.
| Enclosure | |
| Base Frame | Welded Steel |
| Coating | Baked powder coat |
| Capacity (Stocker) | Total of 8 Open Cassette Stations |
| Wafer Size | 3"-6" |
| Automation | |
| Atmospheric Robot (types) | GB4S |
| End Effector (types | Vacuum Gripping, Dual EE |
| Pre-Aligner (types) | Vacuum Gripping Chuck |
| Wafer Mapping | Laser |
| User Interface | Keyboard, mouse, 21" monitor. |
| Software Interface | TBD (Waiting for data from Engineerging) |
| Communications | RS232 (SECS-I), Ethernet (HSMS) |
| Physical Properties | |
| Length | 47.24" |
| Environment | |
| Cleanliness | Class 1 |
