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Genmark’s newest robotic series, the G-Rex™ addresses all current technical specifications for standard payload 300mm and 450mm wafer transport tool applications as the most precise and highest throughput atmospheric robot solution currently available on the market.
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Genmark’s newest robotic series, the G-Rex™ addresses all current technical specifications for standard payload 300mm and 450mm wafer transport tool applications as the most precise and highest throughput atmospheric robot solution currently available on the market.
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The GB7S Robot System employs Genmark’s breakthrough and patented GPR™ Technology to achieve the highest level of performance currently available in an automated wafer handler, which is capable of handling up to 450mm diameter wafers.
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The GPR-GB7SY Yaw-Axis (single and dual yaw) robot features Genmark’s technologically advanced mechanisms including patented GPR and YAW technologies to achieve the highest level of performance currently available in an automated material handler capable of transporting up to 450mm wafer payloads with utmost reliability and precision.
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GPR-GB7-W Robot System is designed with sealed mechanisms to prevent internal damage due to exposure to wet environments associated with automation of CMP and other process applications requiring materials handling under wet conditions.
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The EVTMHS is a wafer handling system with extended vertical travel designed to transport 300mm and 450mm wafers in semiconductor manufacturing tools that require large work envelope solutions.
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The GB4P Robot System with integral wafer pre-aligner is the most compact robot and pre-aligner package available on the market today for wafer handling applications up to 200mm, standard payload and throughput.
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Genmark’s “wet” process wafer handling robot, the GB4S-W Robot System, offers precision, performance, and reliability.
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Designed for ultra-precise transport of 300/450mm wafers and large FPDs, the GPR-GB8 Robot System combines increased reach and load capacity while employing Genmark’s breakthrough patented GPR™ technology.
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The GPR-GB8-SM is a precise high-performance dual arm robot for automated transport applications of 300mm and 450mm wafers.
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